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Mass Flow Controller Product List and Ranking from 20 Manufacturers, Suppliers and Companies

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Mass Flow Controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. ＩＢＳ Osaka//Other manufacturing
  4. 4 リンテック 東京営業所 Tokyo//Machine elements and parts
  5. 5 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
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Mass Flow Controller Product ranking

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. Mass Flow Controller/ Meter "SLAMf Series" ITWジャパン
  2. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  3. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  4. 4 System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 5 Mass Flow Controller "Aera FC-R7700 Series" ＩＢＳ

Mass Flow Controller Product List

1～15 item / All 107 items

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High-Temperature Mass Flow Controller MC-3000L-TC series

High-Temperature Mass Flow Controller MC-3000L-TC series

This is a high-temperature compatible model of the high-performance digital mass flow controller MC-3000L series, which has a variety of features.

This is a high-temperature digital mass flow controller in a 1.125-inch size that achieves high precision of 1.0% F.S. with proprietary patented technology. It is ideal for controlling high-temperature gases such as water vapor. 【Features】 ○ RoHS compliant ○ Operating temperature up to 120°C, baking temperature up to 150°C (non-energized) ○ Equipped with a digital interface RS-485 ○ Features a sensor with proprietary patented technology ○ High-temperature compatible, high-precision digital MFC *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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DeviceNet compatible mass flow controller MC-5000L

DeviceNet compatible mass flow controller MC-5000L

It is a super high-performance mass flow controller compatible with DeviceNet.

Mass flow controller compatible with DeviceNet, adopting our unique self-temperature correction sensor (patented in the U.S. and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with DeviceNet interface (SEMI E54, ODVA SEMI SIG MFC Profile) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts our unique self-temperature correction sensor (patented in the U.S. and Japan) ○ Connector type (horizontal or vertical) selectable ○ Fully digital operation ○ Ultra-high performance 1.125-inch width ○ Compatible with surface mount gas interface *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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Liquid Mass Flow Controller LC-3000L series

Liquid Mass Flow Controller LC-3000L series

We precisely control the flow of various liquids using our proprietary sensors.

This is a normally open type mass flow controller for liquids. It can control flow rates from 0.01 to 2.0 g/min (equivalent to C2H5OH). Any liquid that does not corrode stainless steel is acceptable. 【Features】 - Long-term flow stability with a flow sensor using Lintec's unique ambient temperature compensation method - Compact design with a body width of 28.6 mm and an integrated valve structure - Equipped with a general-purpose digital interface (RS-485 compliant) - High-speed response due to the use of a piezo actuator - Diaphragm valve structure adopted (Minimal dead space, structure that minimizes bubble generation) - Bypass-less structure (Easy liquid introduction and internal purging, free installation orientation) - RoHS compliant *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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Low Differential Pressure Mass Flow Controller MC-3000S series

Low Differential Pressure Mass Flow Controller MC-3000S series

It is a mass flow controller that can operate at low differential pressure such as SDS.

This is a mass flow controller that can control gas flow rates even at low pressure using proprietary technology. 【Features】 ○ Capable of controlling 10 SCCM (N2) at a differential pressure of 6 Torr due to its unique low-pressure loss structure ○ Suitable for applications such as AsH3 and PH3, and can control gases from liquids without heating ○ Compatible with the general-purpose interface RS485 ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Equipped with a high-speed, high-performance piezo actuator *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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Low-cost mass flow controller MC-10RC series

Low-cost mass flow controller MC-10RC series

A mass flow controller developed for analysis devices and various film deposition equipment, which is low-cost yet equipped with basic performance. It contributes to the improvement of semiconductor manufacturing costs.

The MC-10 series mass flow controller for gases is a low-cost model that can contribute to improving semiconductor manufacturing costs through short delivery times. It achieves low pricing by utilizing solenoid actuators and rubber seals. 【Features】 - Achieves low pricing by adopting rubber seals - Guarantees flow accuracy of ±1.0% F.S. - Supports a wide flow range - With the optional variable range function, it can accommodate multiple specifications with a single unit (gas type, F.S., and flow can be changed) - Stable operation even in environments with high-frequency noise and direct current magnetic fields, thanks to the use of a metal case and various filters *For other functions and details, please download the PDF.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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EtherCAT-compatible mass flow controller MC-5000C

EtherCAT-compatible mass flow controller MC-5000C

It is a high-precision mass flow controller compatible with EtherCAT.

Mass flow controller compatible with EtherCAT, adopting our unique self-temperature compensation sensor (patented in the US and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with digital interface (SEMI E54. 20-1108) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts Lintec's unique self-temperature compensation sensor (patented in the US and Japan) ○ Fully digital operation ○ Ultra-high performance with a width of 1.125 inches ○ Compatible with surface mount gas interfaces *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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MODEL EX-250S SERIES

MODEL EX-250S SERIES

RS485 communication function available! Compact design digital mass flow controller/meter.

The "MODEL EX-250S SERIES" is a compact digital mass flow controller/meter that allows for the switching of gas types using a rotary switch. It features RS485 communication capabilities and offers selectable analog input/output of 0-5VDC/4-20mA, as well as power supply options of ±15VDC/24VDC. The total flow control range has a response time of within 1 second. Please feel free to consult us when you need assistance. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 5 SCCM to 10 SLM ■ Accuracy: ±1% F.S. ■ Compact design ■ Gas type switching possible with a rotary switch *For more details, please refer to the PDF materials or feel free to contact us.

  • Flow Meter

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MODEL 5100 SERIES

MODEL 5100 SERIES

Dead volume reduction! Metal seal mass flow controller with a maximum flow rate of 1 SCCM to 20 SLM.

The "MODEL 5100 SERIES" is a metal-sealed mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume with a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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MODEL HFC-303 SERIES

MODEL HFC-303 SERIES

Introducing a mass flow controller that supports large flow rates up to F.S. 1000 SLM in N2 conversion!

We would like to introduce our high-flow mass flow controller, 'MODEL HFC-303 SERIES'. It supports high flow rates up to F.S. 1000SLM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc. (gases), with a maximum flow rate ranging from 100 to 1000SLM (gases). Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal wire sensor ■ Valve Type: Proportional solenoid + Pneumatic two-stage valve (closed when not energized) ■ Accuracy: ±1% F.S. (at 25°C) ■ Allowable Ambient Temperature: 5 to 45°C ■ Electrical Connection: D-sub 15 pin ■ Weight: Approximately 2400g *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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PI Mass Flow Controller "MODEL ST-500"

PI Mass Flow Controller "MODEL ST-500"

Metal seal MFC with diaphragm-type valve! Compatible with corrosive fluids due to EP treatment and oxidation film treatment.

The "MODEL ST-500 SERIES" is a mass flow controller equipped with PI functionality (Pressure Insensitive). It features a pressure sensor installed before the flow sensor, which captures pressure fluctuations and compares them to the pressure before the fluctuation, allowing for real-time adjustments to the valve opening. This enables stable flow control in response to pressure variations. It is suitable for gas supply processes that require stability and accuracy, such as semiconductor manufacturing equipment. 【Features】 ■ Stable flow control in response to pressure fluctuations (only for ST-500) ■ Supports DeviceNet, EtherCAT, and RS485 (only for ST-550) ■ Compatible with IGS W seal fittings ■ High-precision measurement control with S.P. accuracy, response time within 1 second across the entire flow control range ■ Multi-range function via a dedicated app (30-100% F.S.) *For more details, please download the PDF or feel free to contact us.

  • Flow Control

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Fujikin Inc. "Mass Flow Controller"

Fujikin Inc. "Mass Flow Controller"

Fujikin's FCS always leads in flow (fluid) control technology!

The Fujikin FCS series is a "gas flow control device" that can be used in various industries. The FCS series offers two different product lineups with distinct control methods: the FCS-Pressure (pressure control method) series and the FCS-Thermal (thermal flow sensor control method) series.

  • Flow Control

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Mass flow controller Type 874X compatible with CANopen.

Mass flow controller Type 874X compatible with CANopen.

In addition to the high-speed response performance and high range availability of conventional models, it also supports CANopen!

● MFC compatible with CANOpen ● High response speed (fastest within 0.3 seconds, within 0.5 seconds for some models) ● A wide range of lineup supporting flow rates from 10 [ml/min] to 1500 [l/min] ● Protection rating IP65

  • Flow Control

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Achieving low cost is also possible! Mass flow controllers for the IoT era.

Achieving low cost is also possible! Mass flow controllers for the IoT era.

Control small to large flow rates with a single unit! Capable of handling micro to high differential pressures (10kPa to 1.0MPa)! A German-made MFC for the IoT era that also enables cost reduction.

The German manufacturing industry is gaining attention with Industry 4.0. Here’s a proposal for a mass flow controller from Bürkert, a long-established German fluid control equipment manufacturer, designed for the IoT era! 【One device, multiple roles!】 ● Capable of controlling flow rates from low to high (for example, 20 to 1500 Nl/min (N2)) with a single unit ● Smooth control even at a low differential pressure of 10 kPa thanks to the inline sensor ● Smooth control even at a high differential pressure of 1.0 MPa (10 bar) ● Complete shut-off achieved with resin seals and shut-off functionality ● Fast response to set points with stability (within 0.3 to 0.5 seconds) ● The latest models can handle maximum flow rates of up to 2500 L/min! 【Easy to implement & ready for immediate use!】 ● Shipped calibrated, so no setup or adjustment is needed for immediate use ● No dedicated power supply required (operates on DC 24V) for easy installation 【Unique to Bürkert & IoT generation】 ● Flexible support for communication methods such as OpenCAN, fieldbus, RS485, in addition to analog input/output signals ● Models with protection rating IP65 are also available ● Proposals focused on maintenance ease and space-saving designs are also possible!

  • app.jpg
  • EDIP-graphical-programming_full_detail.jpg
  • 874X.jpg
  • Flow Control

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High-speed response MFC (Mass Flow Controller) that follows in 0.3 seconds.

High-speed response MFC (Mass Flow Controller) that follows in 0.3 seconds.

High-speed response within 0.3 seconds! For devices with frequent changes in set flow rate! Wide pressure range support (0.01 to 1.0 MPa).

Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications that set them apart from competitors, designed for industries requiring diverse specifications, unlike those for the semiconductor industry. In addition to response speed: 【Bürkert's industrial mass flow controllers feature】 ● High pressure compatibility → Up to 1.0 MPa ● Minimum required differential pressure → 10 kPa is sufficient ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves 【Additionally, as IoT generation mass flow controllers】 ● Compatible with various communication standards EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET

  • app.jpg
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  • 874X.jpg
  • Flow Control

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Mass flow usable at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa.

Mass flow usable at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa.

Mass flow controller (MFC) compatible with a wide range of operating pressures. It enables high-speed response within 0.3 seconds. It can also control large flow rates!

Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications tailored to different industries, setting them apart from competitors with unique features. Beyond pressure range, Bürkert's industrial mass flow controllers offer: ● Rangeability → High precision of 1:100 ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves Additionally, as IoT generation mass flow controllers, they support various communication standards: EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET.

  • app.jpg
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  • 874X.jpg
  • Flow Control

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